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Introduction

When a tool or tester on your line stops working, everyone scrambles to correct it. Such process halts slow the manufacturing process, and cause lower product throughput. Achieving the best equipment up time is a key element in achieving profitability in any automated factory.

When tool halts are random they are quite difficult to troubleshoot. Their frequency could be every few minutes or just once a month!. Equipment diagnostics often provide no information as to the cause of these random equipment problems.

Finding the Cause of the Problem

When an automated process halts sporadically, both the hardware and the software are suspect.  Often there are lengthy finger pointing discussions between the hardware and software engineers which does not bring the problem any closer to a solution.

In some cases, the problem is neither the hardware nor the software.  Rather it can be electromagnetic interference (EMI) generated by electrostatic discharge (ESD). The EMI generated by ESD can exceed immunity levels of automation equipment. ESD discharges occur so fast (typically in nanoseconds) that they radiate EMI extremely efficiently.  This very short transient EMI is surprisingly high in amplitude because all of its energy is packed into a few nanoseconds.  Further, these short EMI transients are not detected by spectrum analyzers.

An electrostatic discharge occurs when charged objects come close enough to ground to cause a breakdown of the air gap between the object  and ground. Transferring wafers or reticles with a grounded robot or plugging a charged IC into a socket are obvious examples of such ESD events. ESD is well-known to cause damage directly to reticles, wafers and ICs.

Once an ESD event injects an EMI transient into a tool, it is efficiently transmitted through the electronic circuitry within the tool.  Circuit boards are laid out to distribute high speed clock signals and thus EMI transients are also transmitted efficiently.   It is important to realize that for EMI to cause an error it must be induced in the circuitry simultaneously with a critical circuit operation.  Thus, many EMI events can occur before one causes a tool error to occur.  This is also the reason that this type of tool halt is random in nature.

The tool halt, may be accompanied by a difficult-to-interpret error message. Equipment diagnostics succeed in making the problem look like a software bug, certainly not  EMI from an ESD event.

Conducted vs. Radiated EMI

When an ESD event occurs, the rapid transfer of charge results in currents that may be hundreds of Amperes. The entire discharge typically occurs in a time interval measured in nanoseconds. While some of the energy is dissipated in heat (which damages silicon and metallization), a significant portion of the energy becomes electromagnetic radiation. This generally occurs in the 25 MHz to 2 GHz frequency range. It may be conducted away from the site of the ESD event through a metal structure or a power line, or it may radiate through the air. In either case it may affect equipment at a considerable distance from the location of the ESD event.

Identifying ESD caused EMI

ESD diagnostics are not part of the toolkit of most production engineers. As an illustration, a manufacturer of microprocessors was experiencing random equipment problems with one of nine steppers in the photolithography area. In-house engineers and the equipment manufacturer’s field service engineers tried software upgrades and replacement of major stepper components. After 6 months of frustrating and unsuccessful investigation, a well known  ESD consultant made measurements with an antenna and a wide band digitizing oscilloscope.  He detected a random signal on the power supply line of the stepper occurring about once a minute. The random nature of the signal pointed to EMI as the possible cause of the problem.

An electrostatic field-meter found static charge developing on a panel and identified the cause of the problem in less than one hour. One of the wall panels above the stepper was not connected to ground. This large isolated conductor was becoming charged, and then discharging to the nearby grounded wall framing. The EMI from the ESD event was causing the equipment interrupts.

Diagnostic Clues

When an unexplained phenomenon occurs in a random fashion on some tools of a given tool type but not all of them that is a clue.  When a “software bug” is evident on some tools but not all but the tools have the same Rev Level of software, that is another clue.  Most importantly, do not wait six months before considering this cause for the problem.  There are tools for the detection of these transients that range from multi Giga Hertz digitizing oscilloscopes to simple EMI locators designed to be sensitive to these transients.

Conclusions

Many equipment failures are the result of random ESD events and a great deal of production and engineering time is wasted pursuing phantom software problems.

Charge generation is unavoidable in many high tech manufacturing processes due to the presence of easily charged insulating materials. It is impossible to assure that everything is continuously connected to ground and that ESD events will not occur. 5 Making ESD control part of your arsenal of tools to keep your factory running smoothly is an important addition.

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References

1. Levit, L., Menear, J.”Measuring and Quantifying Static Charge in Cleanrooms and Process Tools”, Solid State Technology, February 1998. PennWell.

2. Honda, M., et al, “Method of Observing ESD Around Electronic Equipment”, ESD Symposium, September 1996, ESD Association, 7900 Turin Road, Rome NY 13440.

3. Peters, L., “ESD Can Be a Tool’s Worst Enemy”, Semiconductor International, September 1997, Cahners Publishing Company.

4. SEMI E78-0998 “Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment, September 1998, SEMI.

5. Galatowitsch, S., “Terminating Static in the Cleanroom”, Cleanrooms, April 1998, PennWell.

Transforming Technologies provides comprehensive knowledge of electrostatic issues, effective solution-oriented products and outstanding, friendly service. buy accutane online canada

Because customer needs periodically include requirements for consultation, training, auditing or verification, we offer  Professional ESD Services, in cooperation with buy accutane online india.

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Please contact us for more information on our professional services and insure that your static control program is as effective and efficient as possible.

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best online pharmacy to buy accutaneAt Transforming Technologies, we have a credo we call “Static Care“. “Static Care” is our promise to provide the best customer service possible.  Part of providing great customer service is having quick and open communication with our customers.  With that in mind, we have committed to man Skype and Google Talk Monday through Friday 8:30-5:30 to chat with our customers.  Add us to your contacts, our name is: Transforming.Technologies

We are available to answer product questions, tech support, price, lead time or just to chat about the weather…we are located in Ohio, so… its bad.

A big thanks goes out to everyone who visited the the best place to buy generic accutane and the best place to buy accutane uk booth at the Wisconsin/Great Lakes Expo & Tech Forum in Milwaukee.  It was a fantastic opportunity to talk about our static control products to some interesting companies in the Illinois/Wisconsin area.

In case you missed us or wanted more information, here is a highlight of the products at our booth:

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The Transforming Technologies HG1360 Heel Grounder is constructed from durable materials and features a black stretch loop closure to maximize fit and comfort. A buried 1 meg ohm resistor is standard. HG1360 heel grounders are worn on both feet to provide consistent grounding while in motion.

HG1360 heel grounders connect the person wearing them to ground via a proper floor mat or flooring material. Wearing the conductive ribbon inside the shoe or sock assures proper electrical contact with the user. The ribbon connects to the conductive rubber to complete the circuit between the operator and the static controlled floor or mat.

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buy accutane online bodybuildingprovides complete ESD protection to two operators by monitoring both resistance and voltage independently using dual conductor wrist strap. It also monitors ESD mat ground and low resistance of tool chassis’ ground simultaneously.

buy brand accutane assure compliance with personnel grounding requirements and protect ESD safe workstations by sensing when an operator is within the protected work area and alarming if the operator is not grounded.

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can you buy accutane over the counterTransforming Technologies’ can you buy accutane in mexico is an effective static eliminating device that integrates best-in-class AC performance, mechanical and ergonomic design features into a superior and affordable package.

can you buy accutane onlineThe IN6430 uses Ptecâ„¢, a specialized piezoceramic technology, to create a high frequency AC ionizing output with exceptional balance and decay performance. We eliminate high voltage cables by locating the power supply in the ionizing gun handle. Our OSHA compliant emitter nozzle protects both the operator and ionizer. Emitter contamination and wear are virtually non-existent with AC ionizing guns.

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Static damage is a constant threat anywhere micro-electronic com-ponents are used, but these components are at highest risk during servicing. The Transforming Technologies’ cheapest place to buy accutane is designed to quickly and reliably remove static charge on the service technician and provide a safe static-free surface to lay parts. The kit includes a 24” x 24” rugged mat with two 8” x 12” pockets for storing tools, an adjustable wrist band, coil cord and 15’ ground cord.

The FSM2424 Field Service Kits eliminates static charge through the principle of grounding. Both the mat and the operator’s wrist band connect to the specialized ground cord which when properly connected to ground, provides a safe path for static charges to drain to ground.

Field Service Procedure

1. Upon arrival at the service call site, unpack the field service kit in a convenient area near the equipment to be serviced.
2. Remove any accessories from the pockets and attach the ground cord to the mat via one of the two snaps found in the corner of the mat.
3. Connect the opposite end of the cord to a reliable ground. Common ground locations are water pipes, unpainted equipment frames, and building frames.
4. Slip on the wrist band and adjust the size to fit comfortably around the wrist but tight enough to make contact with the skin at all times. Snap the coil cord to the wrist band.
5. Insert the banana plug of the coil cord into the jack of the ground cord. This connects the wrist band to the same common ground as the work surface.
6. It is now safe to remove and handle static-sensitive components.

Field Service Care

The FSM2424 Field Service Kits can be cleaned with ESD-safe mat and surface cleaner or with a mild detergent and water as needed. Once clean, allow the material to air dry, removing any excess water/moisture with an absorbent cloth. DO NOT use heat of any kind to dry mat. Though inherently flame resistant, the field service products will burn with enough exposure to open flame or other heat sources of sufficient temperature. DO NOT use a clothes dryer, as the excess heat may cause the PVC material to retain the shape it held in the dryer. Most strong solvents are not recommended. AVOID: Halogens, concentrated Oxidizing Agents, Ethers, ketones, and Low-Molecular Weight Solvents derived from the Ether and ketones fami-lies. They include (but are not limited to) TetraHydroFuran (THF), Methyl Ethyl ketone (MEK), Methyl Isobutyl Ketone (MIBK) and Acetone. These chemicals will mar and/or destroy the sur-face of the PVC product (the Ketones), react with it (Oxidizing Agents), or actually dissolve it (THF and other Ethers). Wrist strap can be hand or machined washed.

Here at Transforming Technologies, we routinely receive phone calls and emails this time of year asking us how to prevent statics shocks around the home. While we love to help people when we can, the solutions and buy claravis accutane we provide are geared more for manufacturing and the electronics fields.  This is why I was very excited to read the popular blog can u buy accutane over the counter explain common ways to eliminate static shocks in the home.

“One of the easiest ways to avoid static shock is to pay attention to what you’re wearing and what kind of fabrics make up the furniture in your house. For example, buy accutane cream rubber-soled shoes are great insulators, and will build up a lot of static in your body when combined with a wool or nylon carpet. Instead, try walking around in leather soled shoes, or cotton socks instead of wool socks. Leather soled shoes are also great for grocery shopping, since shopping carts can often cause lots of static electricity.

Similarly, wool sweaters are common offenders, especially in the dry winter (when you usually wear them). If you sit in a chair made out of the right fabric, you’ll build up quite a bit of static. Again, cotton is going to be much more friendly, so try wearing cotton clothes when you want to avoid nasty shocks. Certain furniture covers or antistatic sprays can help alleviate this problem, too.

You may have also noticed that often, when you get out of your car, you get a shock when you touch the door. You might have even heard that touching the door frame as you get out of the car can help, and that’s true. Make sure you start holding the metal frame before you get out of the car, and you keep touching it until you’re out of the seat completely. If you forget to do this, you can also touch the car door with your keys. Since the electricity will discharge through them, you won’t feel a shock”

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